Compound semiconductor MEMS community targets new applications
نویسنده
چکیده
The multi-billion-dollar market for micro-electro-mechanical systems (MEMS) devices containing micron-sized moving parts produced by photolithographic processes is overwhelmingly dominated by silicon. However, this material is not suitable for the fabrication of certain devices, and academic institutions and company research labs are using various compound semiconductor materials to produce MEMS-based devices, including VCSELs, tunable filters, optical amplifiers, mechanical detectors and pressure sensors.
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تاریخ انتشار 2006